JPS61183528U - - Google Patents
Info
- Publication number
- JPS61183528U JPS61183528U JP1985067415U JP6741585U JPS61183528U JP S61183528 U JPS61183528 U JP S61183528U JP 1985067415 U JP1985067415 U JP 1985067415U JP 6741585 U JP6741585 U JP 6741585U JP S61183528 U JPS61183528 U JP S61183528U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- treatment
- surface treatment
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004381 surface treatment Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000007599 discharging Methods 0.000 claims 1
- 238000007788 roughening Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985067415U JPH0238439Y2 (en:Method) | 1985-05-09 | 1985-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985067415U JPH0238439Y2 (en:Method) | 1985-05-09 | 1985-05-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61183528U true JPS61183528U (en:Method) | 1986-11-15 |
| JPH0238439Y2 JPH0238439Y2 (en:Method) | 1990-10-17 |
Family
ID=30601219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985067415U Expired JPH0238439Y2 (en:Method) | 1985-05-09 | 1985-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238439Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006147672A (ja) * | 2004-11-17 | 2006-06-08 | Dainippon Screen Mfg Co Ltd | 基板回転式処理装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5068067A (en:Method) * | 1973-10-17 | 1975-06-07 | ||
| JPS53166861U (en:Method) * | 1977-06-01 | 1978-12-27 | ||
| JPS5599725A (en) * | 1979-01-26 | 1980-07-30 | Matsushita Electric Ind Co Ltd | Method and device for manufacturing semiconductor device |
| JPS5745237A (en) * | 1980-09-01 | 1982-03-15 | Fujitsu Ltd | Rotary processing device |
| JPS5830753A (ja) * | 1981-08-17 | 1983-02-23 | Hitachi Ltd | 現像液の再生処理方法 |
| JPS5924849A (ja) * | 1982-08-02 | 1984-02-08 | Hitachi Ltd | フオトマスクの洗浄方法 |
-
1985
- 1985-05-09 JP JP1985067415U patent/JPH0238439Y2/ja not_active Expired
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5068067A (en:Method) * | 1973-10-17 | 1975-06-07 | ||
| JPS53166861U (en:Method) * | 1977-06-01 | 1978-12-27 | ||
| JPS5599725A (en) * | 1979-01-26 | 1980-07-30 | Matsushita Electric Ind Co Ltd | Method and device for manufacturing semiconductor device |
| JPS5745237A (en) * | 1980-09-01 | 1982-03-15 | Fujitsu Ltd | Rotary processing device |
| JPS5830753A (ja) * | 1981-08-17 | 1983-02-23 | Hitachi Ltd | 現像液の再生処理方法 |
| JPS5924849A (ja) * | 1982-08-02 | 1984-02-08 | Hitachi Ltd | フオトマスクの洗浄方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006147672A (ja) * | 2004-11-17 | 2006-06-08 | Dainippon Screen Mfg Co Ltd | 基板回転式処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0238439Y2 (en:Method) | 1990-10-17 |