JPS61180140U - - Google Patents
Info
- Publication number
- JPS61180140U JPS61180140U JP6565185U JP6565185U JPS61180140U JP S61180140 U JPS61180140 U JP S61180140U JP 6565185 U JP6565185 U JP 6565185U JP 6565185 U JP6565185 U JP 6565185U JP S61180140 U JPS61180140 U JP S61180140U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- processing chamber
- control valve
- plasma
- openings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985065651U JPH0348194Y2 (enExample) | 1985-04-30 | 1985-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985065651U JPH0348194Y2 (enExample) | 1985-04-30 | 1985-04-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61180140U true JPS61180140U (enExample) | 1986-11-10 |
| JPH0348194Y2 JPH0348194Y2 (enExample) | 1991-10-15 |
Family
ID=30597834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985065651U Expired JPH0348194Y2 (enExample) | 1985-04-30 | 1985-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0348194Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928535U (ja) * | 1982-08-12 | 1984-02-22 | トヨタ自動車株式会社 | プラズマ処理装置 |
-
1985
- 1985-04-30 JP JP1985065651U patent/JPH0348194Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928535U (ja) * | 1982-08-12 | 1984-02-22 | トヨタ自動車株式会社 | プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0348194Y2 (enExample) | 1991-10-15 |