JPS61179742U - - Google Patents

Info

Publication number
JPS61179742U
JPS61179742U JP1985063275U JP6327585U JPS61179742U JP S61179742 U JPS61179742 U JP S61179742U JP 1985063275 U JP1985063275 U JP 1985063275U JP 6327585 U JP6327585 U JP 6327585U JP S61179742 U JPS61179742 U JP S61179742U
Authority
JP
Japan
Prior art keywords
cleaning
cleaning liquid
liquid
tank
cleaning tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985063275U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985063275U priority Critical patent/JPS61179742U/ja
Publication of JPS61179742U publication Critical patent/JPS61179742U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1985063275U 1985-04-30 1985-04-30 Pending JPS61179742U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985063275U JPS61179742U (US07923587-20110412-C00022.png) 1985-04-30 1985-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985063275U JPS61179742U (US07923587-20110412-C00022.png) 1985-04-30 1985-04-30

Publications (1)

Publication Number Publication Date
JPS61179742U true JPS61179742U (US07923587-20110412-C00022.png) 1986-11-10

Family

ID=30593261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985063275U Pending JPS61179742U (US07923587-20110412-C00022.png) 1985-04-30 1985-04-30

Country Status (1)

Country Link
JP (1) JPS61179742U (US07923587-20110412-C00022.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09206715A (ja) * 1996-01-31 1997-08-12 Puretetsuku:Kk 高周波洗浄方法
JP2019036709A (ja) * 2017-08-18 2019-03-07 エスケイ・シルトロン・カンパニー・リミテッド ウェーハ洗浄装置及びそれを用いたウェーハ洗浄装置のクリーニング方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271871A (en) * 1975-12-11 1977-06-15 Nec Corp Washing apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271871A (en) * 1975-12-11 1977-06-15 Nec Corp Washing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09206715A (ja) * 1996-01-31 1997-08-12 Puretetsuku:Kk 高周波洗浄方法
JP2019036709A (ja) * 2017-08-18 2019-03-07 エスケイ・シルトロン・カンパニー・リミテッド ウェーハ洗浄装置及びそれを用いたウェーハ洗浄装置のクリーニング方法

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