JPS61179739U - - Google Patents
Info
- Publication number
- JPS61179739U JPS61179739U JP6185385U JP6185385U JPS61179739U JP S61179739 U JPS61179739 U JP S61179739U JP 6185385 U JP6185385 U JP 6185385U JP 6185385 U JP6185385 U JP 6185385U JP S61179739 U JPS61179739 U JP S61179739U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- moving table
- electron beam
- beam lithography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000609 electron-beam lithography Methods 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6185385U JPS61179739U (el) | 1985-04-26 | 1985-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6185385U JPS61179739U (el) | 1985-04-26 | 1985-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61179739U true JPS61179739U (el) | 1986-11-10 |
Family
ID=30590515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6185385U Pending JPS61179739U (el) | 1985-04-26 | 1985-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61179739U (el) |
-
1985
- 1985-04-26 JP JP6185385U patent/JPS61179739U/ja active Pending