JPS61178560U - - Google Patents
Info
- Publication number
- JPS61178560U JPS61178560U JP6150285U JP6150285U JPS61178560U JP S61178560 U JPS61178560 U JP S61178560U JP 6150285 U JP6150285 U JP 6150285U JP 6150285 U JP6150285 U JP 6150285U JP S61178560 U JPS61178560 U JP S61178560U
- Authority
- JP
- Japan
- Prior art keywords
- support member
- head support
- head
- freedom
- ensure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Springs (AREA)
- Supporting Of Heads In Record-Carrier Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6150285U JPS61178560U (zh) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6150285U JPS61178560U (zh) | 1985-04-24 | 1985-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61178560U true JPS61178560U (zh) | 1986-11-07 |
Family
ID=30589843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6150285U Pending JPS61178560U (zh) | 1985-04-24 | 1985-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61178560U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101450167B1 (ko) * | 2010-10-27 | 2014-10-13 | 에이에스엠엘 네델란즈 비.브이. | 리프 스프링, 스테이지 시스템 및 리소그래피 장치 |
-
1985
- 1985-04-24 JP JP6150285U patent/JPS61178560U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101450167B1 (ko) * | 2010-10-27 | 2014-10-13 | 에이에스엠엘 네델란즈 비.브이. | 리프 스프링, 스테이지 시스템 및 리소그래피 장치 |