JPS61178560U - - Google Patents

Info

Publication number
JPS61178560U
JPS61178560U JP6150285U JP6150285U JPS61178560U JP S61178560 U JPS61178560 U JP S61178560U JP 6150285 U JP6150285 U JP 6150285U JP 6150285 U JP6150285 U JP 6150285U JP S61178560 U JPS61178560 U JP S61178560U
Authority
JP
Japan
Prior art keywords
support member
head support
head
freedom
ensure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6150285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6150285U priority Critical patent/JPS61178560U/ja
Publication of JPS61178560U publication Critical patent/JPS61178560U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Springs (AREA)
JP6150285U 1985-04-24 1985-04-24 Pending JPS61178560U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6150285U JPS61178560U (no) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6150285U JPS61178560U (no) 1985-04-24 1985-04-24

Publications (1)

Publication Number Publication Date
JPS61178560U true JPS61178560U (no) 1986-11-07

Family

ID=30589843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6150285U Pending JPS61178560U (no) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPS61178560U (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101450167B1 (ko) * 2010-10-27 2014-10-13 에이에스엠엘 네델란즈 비.브이. 리프 스프링, 스테이지 시스템 및 리소그래피 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101450167B1 (ko) * 2010-10-27 2014-10-13 에이에스엠엘 네델란즈 비.브이. 리프 스프링, 스테이지 시스템 및 리소그래피 장치

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