JPS61177789U - - Google Patents
Info
- Publication number
- JPS61177789U JPS61177789U JP1985061731U JP6173185U JPS61177789U JP S61177789 U JPS61177789 U JP S61177789U JP 1985061731 U JP1985061731 U JP 1985061731U JP 6173185 U JP6173185 U JP 6173185U JP S61177789 U JPS61177789 U JP S61177789U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- condensing lens
- circuit forming
- axis table
- introduction section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Description
第１図は本考案の一実施例による導体回路形成
装置、第２図は従来のレーザビーム加工装置の夫
々説明図である。
１……絶縁基材、１ａ……焼成型導体ペースト
、３……共振器、４……レーザビーム、６……槽
、７……集光レンズ、８……還元性又は中性ガス
導入路、９……酸素導入路、１０……Ｘ―Ｙ軸テ
ーブル。
FIG. 1 is an explanatory diagram of a conductor circuit forming apparatus according to an embodiment of the present invention, and FIG. 2 is an explanatory diagram of a conventional laser beam processing apparatus. DESCRIPTION OF SYMBOLS 1... Insulating base material, 1a... Sintered conductor paste, 3... Resonator, 4... Laser beam, 6... Tank, 7... Condensing lens, 8... Reducing or neutral gas introduction path , 9...Oxygen introduction path, 10...X-Y axis table.
Claims (1)
走引させるＸ―Ｙ軸テーブル、前記基板にレーザ
ビームを指向させる集光レンズ等を本体部に装備
したレーザビーム照射型導体回路形成装置におい
て、少なくとも上記Ｘ―Ｙ軸テーブル及び集光レ
ンズを還元性、又は中性ガス導入部を有する槽内
に収め、かつ該集光レンズのレーザビーム照射側
に微量の酸素導入部を具備させたことを特徴とす
る導体回路形成装置。 In a laser beam irradiation type conductor circuit forming apparatus, the main body is equipped with an X-Y axis table on which a substrate coated with a sintered conductor paste is placed and moved, a condensing lens for directing a laser beam to the substrate, etc. At least the X-Y axis table and the condensing lens are housed in a tank having a reducing or neutral gas introduction section, and a small amount of oxygen introduction section is provided on the laser beam irradiation side of the condensing lens. Characteristic conductor circuit forming device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985061731U JPH0249740Y2 (en) | 1985-04-26 | 1985-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985061731U JPH0249740Y2 (en) | 1985-04-26 | 1985-04-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61177789U true JPS61177789U (en) | 1986-11-06 |
| JPH0249740Y2 JPH0249740Y2 (en) | 1990-12-27 |
Family
ID=30590278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985061731U Expired JPH0249740Y2 (en) | 1985-04-26 | 1985-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249740Y2 (en) |
-
1985
- 1985-04-26 JP JP1985061731U patent/JPH0249740Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249740Y2 (en) | 1990-12-27 |
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