JPS6117765Y2 - - Google Patents

Info

Publication number
JPS6117765Y2
JPS6117765Y2 JP5176081U JP5176081U JPS6117765Y2 JP S6117765 Y2 JPS6117765 Y2 JP S6117765Y2 JP 5176081 U JP5176081 U JP 5176081U JP 5176081 U JP5176081 U JP 5176081U JP S6117765 Y2 JPS6117765 Y2 JP S6117765Y2
Authority
JP
Japan
Prior art keywords
shaft
clutch
gear
feed
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5176081U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57166612U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5176081U priority Critical patent/JPS6117765Y2/ja
Publication of JPS57166612U publication Critical patent/JPS57166612U/ja
Application granted granted Critical
Publication of JPS6117765Y2 publication Critical patent/JPS6117765Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Multi-Process Working Machines And Systems (AREA)
  • Drilling And Boring (AREA)
JP5176081U 1981-04-09 1981-04-09 Expired JPS6117765Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5176081U JPS6117765Y2 (enrdf_load_stackoverflow) 1981-04-09 1981-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5176081U JPS6117765Y2 (enrdf_load_stackoverflow) 1981-04-09 1981-04-09

Publications (2)

Publication Number Publication Date
JPS57166612U JPS57166612U (enrdf_load_stackoverflow) 1982-10-20
JPS6117765Y2 true JPS6117765Y2 (enrdf_load_stackoverflow) 1986-05-30

Family

ID=29848475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5176081U Expired JPS6117765Y2 (enrdf_load_stackoverflow) 1981-04-09 1981-04-09

Country Status (1)

Country Link
JP (1) JPS6117765Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06101420B2 (ja) * 1983-08-12 1994-12-12 株式会社日立製作所 半導体ホトマスクまたはレチクル用外観検査装置

Also Published As

Publication number Publication date
JPS57166612U (enrdf_load_stackoverflow) 1982-10-20

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