JPS61177447U - - Google Patents

Info

Publication number
JPS61177447U
JPS61177447U JP6152285U JP6152285U JPS61177447U JP S61177447 U JPS61177447 U JP S61177447U JP 6152285 U JP6152285 U JP 6152285U JP 6152285 U JP6152285 U JP 6152285U JP S61177447 U JPS61177447 U JP S61177447U
Authority
JP
Japan
Prior art keywords
detected portion
pattern
slit light
irradiates
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6152285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6152285U priority Critical patent/JPS61177447U/ja
Publication of JPS61177447U publication Critical patent/JPS61177447U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP6152285U 1985-04-24 1985-04-24 Pending JPS61177447U (US06373033-20020416-M00071.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6152285U JPS61177447U (US06373033-20020416-M00071.png) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6152285U JPS61177447U (US06373033-20020416-M00071.png) 1985-04-24 1985-04-24

Publications (1)

Publication Number Publication Date
JPS61177447U true JPS61177447U (US06373033-20020416-M00071.png) 1986-11-05

Family

ID=30589878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6152285U Pending JPS61177447U (US06373033-20020416-M00071.png) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPS61177447U (US06373033-20020416-M00071.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0362597A (ja) * 1989-07-28 1991-03-18 Matsushita Electric Ind Co Ltd 粘性流体塗布方法と粘性流体塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0362597A (ja) * 1989-07-28 1991-03-18 Matsushita Electric Ind Co Ltd 粘性流体塗布方法と粘性流体塗布装置

Similar Documents

Publication Publication Date Title
JPH01152225U (US06373033-20020416-M00071.png)
JPS61177447U (US06373033-20020416-M00071.png)
JPS6278768U (US06373033-20020416-M00071.png)
JPS6260975U (US06373033-20020416-M00071.png)
JPS6299630U (US06373033-20020416-M00071.png)
JPS6211824U (US06373033-20020416-M00071.png)
JPS61105595U (US06373033-20020416-M00071.png)
JPS62140669U (US06373033-20020416-M00071.png)
JPH0217833U (US06373033-20020416-M00071.png)
JPS61122508U (US06373033-20020416-M00071.png)
JPH025935U (US06373033-20020416-M00071.png)
JPH0378221U (US06373033-20020416-M00071.png)
JPS61160426U (US06373033-20020416-M00071.png)
JPS6285448U (US06373033-20020416-M00071.png)
JPS6448662U (US06373033-20020416-M00071.png)
JPS6372727U (US06373033-20020416-M00071.png)
JPS6327438U (US06373033-20020416-M00071.png)
JPS6224380U (US06373033-20020416-M00071.png)
JPH0171606U (US06373033-20020416-M00071.png)
JPH0227888U (US06373033-20020416-M00071.png)
JPS6386106U (US06373033-20020416-M00071.png)
JPH0465158U (US06373033-20020416-M00071.png)
JPS62111601U (US06373033-20020416-M00071.png)
JPH0390007U (US06373033-20020416-M00071.png)
JPS61164573U (US06373033-20020416-M00071.png)