JPS61177439U - - Google Patents
Info
- Publication number
- JPS61177439U JPS61177439U JP6128085U JP6128085U JPS61177439U JP S61177439 U JPS61177439 U JP S61177439U JP 6128085 U JP6128085 U JP 6128085U JP 6128085 U JP6128085 U JP 6128085U JP S61177439 U JPS61177439 U JP S61177439U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- thin film
- vapor
- film forming
- spouting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6128085U JPS61177439U (et) | 1985-04-24 | 1985-04-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6128085U JPS61177439U (et) | 1985-04-24 | 1985-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61177439U true JPS61177439U (et) | 1986-11-05 |
Family
ID=30589411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6128085U Pending JPS61177439U (et) | 1985-04-24 | 1985-04-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61177439U (et) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5752904U (et) * | 1980-09-12 | 1982-03-27 |
-
1985
- 1985-04-24 JP JP6128085U patent/JPS61177439U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5752904U (et) * | 1980-09-12 | 1982-03-27 |