JPS61175352U - - Google Patents

Info

Publication number
JPS61175352U
JPS61175352U JP1985060692U JP6069285U JPS61175352U JP S61175352 U JPS61175352 U JP S61175352U JP 1985060692 U JP1985060692 U JP 1985060692U JP 6069285 U JP6069285 U JP 6069285U JP S61175352 U JPS61175352 U JP S61175352U
Authority
JP
Japan
Prior art keywords
surface plate
lapping
workpiece
rotating
weir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985060692U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985060692U priority Critical patent/JPS61175352U/ja
Publication of JPS61175352U publication Critical patent/JPS61175352U/ja
Pending legal-status Critical Current

Links

JP1985060692U 1985-04-23 1985-04-23 Pending JPS61175352U (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985060692U JPS61175352U (sv) 1985-04-23 1985-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985060692U JPS61175352U (sv) 1985-04-23 1985-04-23

Publications (1)

Publication Number Publication Date
JPS61175352U true JPS61175352U (sv) 1986-10-31

Family

ID=30588276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985060692U Pending JPS61175352U (sv) 1985-04-23 1985-04-23

Country Status (1)

Country Link
JP (1) JPS61175352U (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000007771A1 (fr) * 1998-08-04 2000-02-17 Shin-Etsu Handotai Co., Ltd. Procede et dispositif de polissage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000007771A1 (fr) * 1998-08-04 2000-02-17 Shin-Etsu Handotai Co., Ltd. Procede et dispositif de polissage
US6332830B1 (en) 1998-08-04 2001-12-25 Shin-Etsu Handotai Co., Ltd. Polishing method and polishing device

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