JPS61174777A - 半導体放射線検出器の製造方法 - Google Patents

半導体放射線検出器の製造方法

Info

Publication number
JPS61174777A
JPS61174777A JP60015682A JP1568285A JPS61174777A JP S61174777 A JPS61174777 A JP S61174777A JP 60015682 A JP60015682 A JP 60015682A JP 1568285 A JP1568285 A JP 1568285A JP S61174777 A JPS61174777 A JP S61174777A
Authority
JP
Japan
Prior art keywords
boron
semiconductor substrate
film
radiation detector
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60015682A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0476515B2 (enExample
Inventor
Noritada Sato
則忠 佐藤
Yasukazu Seki
康和 関
Toshio Suzuki
敏夫 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP60015682A priority Critical patent/JPS61174777A/ja
Publication of JPS61174777A publication Critical patent/JPS61174777A/ja
Publication of JPH0476515B2 publication Critical patent/JPH0476515B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T3/00Measuring neutron radiation
    • G01T3/08Measuring neutron radiation with semiconductor detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Light Receiving Elements (AREA)
  • Measurement Of Radiation (AREA)
JP60015682A 1985-01-30 1985-01-30 半導体放射線検出器の製造方法 Granted JPS61174777A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60015682A JPS61174777A (ja) 1985-01-30 1985-01-30 半導体放射線検出器の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60015682A JPS61174777A (ja) 1985-01-30 1985-01-30 半導体放射線検出器の製造方法

Publications (2)

Publication Number Publication Date
JPS61174777A true JPS61174777A (ja) 1986-08-06
JPH0476515B2 JPH0476515B2 (enExample) 1992-12-03

Family

ID=11895519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60015682A Granted JPS61174777A (ja) 1985-01-30 1985-01-30 半導体放射線検出器の製造方法

Country Status (1)

Country Link
JP (1) JPS61174777A (enExample)

Also Published As

Publication number Publication date
JPH0476515B2 (enExample) 1992-12-03

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