JPS61174740U - - Google Patents
Info
- Publication number
- JPS61174740U JPS61174740U JP5751685U JP5751685U JPS61174740U JP S61174740 U JPS61174740 U JP S61174740U JP 5751685 U JP5751685 U JP 5751685U JP 5751685 U JP5751685 U JP 5751685U JP S61174740 U JPS61174740 U JP S61174740U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heater
- thermocouple
- beam source
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985057516U JPH0333059Y2 (https=) | 1985-04-19 | 1985-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985057516U JPH0333059Y2 (https=) | 1985-04-19 | 1985-04-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61174740U true JPS61174740U (https=) | 1986-10-30 |
| JPH0333059Y2 JPH0333059Y2 (https=) | 1991-07-12 |
Family
ID=30582120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985057516U Expired JPH0333059Y2 (https=) | 1985-04-19 | 1985-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0333059Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725733U (https=) * | 1980-07-18 | 1982-02-10 | ||
| JPS5842224A (ja) * | 1981-09-07 | 1983-03-11 | Mitsubishi Electric Corp | 真空蒸着用セル |
-
1985
- 1985-04-19 JP JP1985057516U patent/JPH0333059Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5725733U (https=) * | 1980-07-18 | 1982-02-10 | ||
| JPS5842224A (ja) * | 1981-09-07 | 1983-03-11 | Mitsubishi Electric Corp | 真空蒸着用セル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0333059Y2 (https=) | 1991-07-12 |