JPS61174163U - - Google Patents

Info

Publication number
JPS61174163U
JPS61174163U JP5799785U JP5799785U JPS61174163U JP S61174163 U JPS61174163 U JP S61174163U JP 5799785 U JP5799785 U JP 5799785U JP 5799785 U JP5799785 U JP 5799785U JP S61174163 U JPS61174163 U JP S61174163U
Authority
JP
Japan
Prior art keywords
ion source
ion
section
accelerating
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5799785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518839Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5799785U priority Critical patent/JPH0518839Y2/ja
Publication of JPS61174163U publication Critical patent/JPS61174163U/ja
Application granted granted Critical
Publication of JPH0518839Y2 publication Critical patent/JPH0518839Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP5799785U 1985-04-18 1985-04-18 Expired - Lifetime JPH0518839Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5799785U JPH0518839Y2 (https=) 1985-04-18 1985-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5799785U JPH0518839Y2 (https=) 1985-04-18 1985-04-18

Publications (2)

Publication Number Publication Date
JPS61174163U true JPS61174163U (https=) 1986-10-29
JPH0518839Y2 JPH0518839Y2 (https=) 1993-05-19

Family

ID=30583068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5799785U Expired - Lifetime JPH0518839Y2 (https=) 1985-04-18 1985-04-18

Country Status (1)

Country Link
JP (1) JPH0518839Y2 (https=)

Also Published As

Publication number Publication date
JPH0518839Y2 (https=) 1993-05-19

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