JPS61173942U - - Google Patents

Info

Publication number
JPS61173942U
JPS61173942U JP1985056006U JP5600685U JPS61173942U JP S61173942 U JPS61173942 U JP S61173942U JP 1985056006 U JP1985056006 U JP 1985056006U JP 5600685 U JP5600685 U JP 5600685U JP S61173942 U JPS61173942 U JP S61173942U
Authority
JP
Japan
Prior art keywords
support frame
thin film
photomask
notch
adhesive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985056006U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985056006U priority Critical patent/JPS61173942U/ja
Publication of JPS61173942U publication Critical patent/JPS61173942U/ja
Pending legal-status Critical Current

Links

JP1985056006U 1985-04-15 1985-04-15 Pending JPS61173942U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985056006U JPS61173942U (US20110009641A1-20110113-C00185.png) 1985-04-15 1985-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985056006U JPS61173942U (US20110009641A1-20110113-C00185.png) 1985-04-15 1985-04-15

Publications (1)

Publication Number Publication Date
JPS61173942U true JPS61173942U (US20110009641A1-20110113-C00185.png) 1986-10-29

Family

ID=30579210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985056006U Pending JPS61173942U (US20110009641A1-20110113-C00185.png) 1985-04-15 1985-04-15

Country Status (1)

Country Link
JP (1) JPS61173942U (US20110009641A1-20110113-C00185.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001005169A (ja) * 1999-06-24 2001-01-12 Shin Etsu Chem Co Ltd ペリクルおよびペリクルの製造方法
JP2021073536A (ja) * 2017-10-10 2021-05-13 信越化学工業株式会社 Euv用ペリクルフレームの通気構造、euv用ペリクル、euv用ペリクル付露光原版、露光方法、半導体の製造方法及び液晶ディスプレイの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001005169A (ja) * 1999-06-24 2001-01-12 Shin Etsu Chem Co Ltd ペリクルおよびペリクルの製造方法
JP2021073536A (ja) * 2017-10-10 2021-05-13 信越化学工業株式会社 Euv用ペリクルフレームの通気構造、euv用ペリクル、euv用ペリクル付露光原版、露光方法、半導体の製造方法及び液晶ディスプレイの製造方法

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