JPS6117371Y2 - - Google Patents
Info
- Publication number
- JPS6117371Y2 JPS6117371Y2 JP8882680U JP8882680U JPS6117371Y2 JP S6117371 Y2 JPS6117371 Y2 JP S6117371Y2 JP 8882680 U JP8882680 U JP 8882680U JP 8882680 U JP8882680 U JP 8882680U JP S6117371 Y2 JPS6117371 Y2 JP S6117371Y2
- Authority
- JP
- Japan
- Prior art keywords
- stopper
- pointer
- meter
- adsorption
- instrument
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 description 9
- 230000005611 electricity Effects 0.000 description 8
- 230000003068 static effect Effects 0.000 description 8
- 229910052573 porcelain Inorganic materials 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002216 antistatic agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8882680U JPS6117371Y2 (cs) | 1980-06-26 | 1980-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8882680U JPS6117371Y2 (cs) | 1980-06-26 | 1980-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5717418U JPS5717418U (cs) | 1982-01-29 |
| JPS6117371Y2 true JPS6117371Y2 (cs) | 1986-05-28 |
Family
ID=29450889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8882680U Expired JPS6117371Y2 (cs) | 1980-06-26 | 1980-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6117371Y2 (cs) |
-
1980
- 1980-06-26 JP JP8882680U patent/JPS6117371Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5717418U (cs) | 1982-01-29 |
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