JPS61173659U - - Google Patents
Info
- Publication number
- JPS61173659U JPS61173659U JP5700285U JP5700285U JPS61173659U JP S61173659 U JPS61173659 U JP S61173659U JP 5700285 U JP5700285 U JP 5700285U JP 5700285 U JP5700285 U JP 5700285U JP S61173659 U JPS61173659 U JP S61173659U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- accommodates
- corners
- edges
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Description
第１図は本考案の一実施例ほよる斜視図である
。
１，２……壁面、３……床面。
FIG. 1 is a perspective view of one embodiment of the present invention. 1, 2...wall surface, 3...floor surface.
Claims (1)
ン・ルームにおいて、その、へり、及びすみを、
鈍角にすることを特徴とするクリーン・ルーム。 In the clean room that accommodates microfabrication processes such as integrated circuits, the edges and corners are
A clean room characterized by obtuse angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5700285U JPS61173659U (en) | 1985-04-17 | 1985-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5700285U JPS61173659U (en) | 1985-04-17 | 1985-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61173659U true JPS61173659U (en) | 1986-10-29 |
Family
ID=30581131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5700285U Pending JPS61173659U (en) | 1985-04-17 | 1985-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61173659U (en) |
-
1985
- 1985-04-17 JP JP5700285U patent/JPS61173659U/ja active Pending