JPS61173200U - - Google Patents
Info
- Publication number
- JPS61173200U JPS61173200U JP5710785U JP5710785U JPS61173200U JP S61173200 U JPS61173200 U JP S61173200U JP 5710785 U JP5710785 U JP 5710785U JP 5710785 U JP5710785 U JP 5710785U JP S61173200 U JPS61173200 U JP S61173200U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- valve
- chamber
- board
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5710785U JPS61173200U (enrdf_load_stackoverflow) | 1985-04-17 | 1985-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5710785U JPS61173200U (enrdf_load_stackoverflow) | 1985-04-17 | 1985-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61173200U true JPS61173200U (enrdf_load_stackoverflow) | 1986-10-28 |
Family
ID=30581327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5710785U Pending JPS61173200U (enrdf_load_stackoverflow) | 1985-04-17 | 1985-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61173200U (enrdf_load_stackoverflow) |
-
1985
- 1985-04-17 JP JP5710785U patent/JPS61173200U/ja active Pending
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