JPS611731Y2 - - Google Patents
Info
- Publication number
- JPS611731Y2 JPS611731Y2 JP1979164107U JP16410779U JPS611731Y2 JP S611731 Y2 JPS611731 Y2 JP S611731Y2 JP 1979164107 U JP1979164107 U JP 1979164107U JP 16410779 U JP16410779 U JP 16410779U JP S611731 Y2 JPS611731 Y2 JP S611731Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979164107U JPS611731Y2 (cs) | 1979-11-26 | 1979-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979164107U JPS611731Y2 (cs) | 1979-11-26 | 1979-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5681535U JPS5681535U (cs) | 1981-07-01 |
| JPS611731Y2 true JPS611731Y2 (cs) | 1986-01-21 |
Family
ID=29675065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979164107U Expired JPS611731Y2 (cs) | 1979-11-26 | 1979-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS611731Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60169841U (ja) * | 1984-04-18 | 1985-11-11 | 株式会社プラズマシステム | 半導体ウエハの自動供給収納装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5012663U (cs) * | 1973-05-30 | 1975-02-08 | ||
| JPS5757068Y2 (cs) * | 1977-08-08 | 1982-12-08 |
-
1979
- 1979-11-26 JP JP1979164107U patent/JPS611731Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5681535U (cs) | 1981-07-01 |