JPS61173156U - - Google Patents

Info

Publication number
JPS61173156U
JPS61173156U JP5616585U JP5616585U JPS61173156U JP S61173156 U JPS61173156 U JP S61173156U JP 5616585 U JP5616585 U JP 5616585U JP 5616585 U JP5616585 U JP 5616585U JP S61173156 U JPS61173156 U JP S61173156U
Authority
JP
Japan
Prior art keywords
gas
laser
pressure fluctuation
discharge tube
piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5616585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5616585U priority Critical patent/JPS61173156U/ja
Publication of JPS61173156U publication Critical patent/JPS61173156U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP5616585U 1985-04-17 1985-04-17 Pending JPS61173156U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5616585U JPS61173156U (enExample) 1985-04-17 1985-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5616585U JPS61173156U (enExample) 1985-04-17 1985-04-17

Publications (1)

Publication Number Publication Date
JPS61173156U true JPS61173156U (enExample) 1986-10-28

Family

ID=30579503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5616585U Pending JPS61173156U (enExample) 1985-04-17 1985-04-17

Country Status (1)

Country Link
JP (1) JPS61173156U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02281673A (ja) * 1989-04-21 1990-11-19 Matsushita Electric Ind Co Ltd 気体レーザ装置
JPH02281674A (ja) * 1989-04-21 1990-11-19 Matsushita Electric Ind Co Ltd 気体レーザ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02281673A (ja) * 1989-04-21 1990-11-19 Matsushita Electric Ind Co Ltd 気体レーザ装置
JPH02281674A (ja) * 1989-04-21 1990-11-19 Matsushita Electric Ind Co Ltd 気体レーザ装置

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