JPS61173140U - - Google Patents

Info

Publication number
JPS61173140U
JPS61173140U JP5650685U JP5650685U JPS61173140U JP S61173140 U JPS61173140 U JP S61173140U JP 5650685 U JP5650685 U JP 5650685U JP 5650685 U JP5650685 U JP 5650685U JP S61173140 U JPS61173140 U JP S61173140U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
boat
wafer boat
wafers
loaded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5650685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5650685U priority Critical patent/JPS61173140U/ja
Publication of JPS61173140U publication Critical patent/JPS61173140U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP5650685U 1985-04-16 1985-04-16 Pending JPS61173140U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5650685U JPS61173140U (US20100268047A1-20101021-C00003.png) 1985-04-16 1985-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5650685U JPS61173140U (US20100268047A1-20101021-C00003.png) 1985-04-16 1985-04-16

Publications (1)

Publication Number Publication Date
JPS61173140U true JPS61173140U (US20100268047A1-20101021-C00003.png) 1986-10-28

Family

ID=30580164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5650685U Pending JPS61173140U (US20100268047A1-20101021-C00003.png) 1985-04-16 1985-04-16

Country Status (1)

Country Link
JP (1) JPS61173140U (US20100268047A1-20101021-C00003.png)

Similar Documents

Publication Publication Date Title
JPS61173140U (US20100268047A1-20101021-C00003.png)
JPS6351445U (US20100268047A1-20101021-C00003.png)
JPS6188233U (US20100268047A1-20101021-C00003.png)
JPS63127121U (US20100268047A1-20101021-C00003.png)
JPS633143U (US20100268047A1-20101021-C00003.png)
JPS62172153U (US20100268047A1-20101021-C00003.png)
JPS63144953U (US20100268047A1-20101021-C00003.png)
JPH0313741U (US20100268047A1-20101021-C00003.png)
JPS6426842U (US20100268047A1-20101021-C00003.png)
JPS6171366U (US20100268047A1-20101021-C00003.png)
JPH0256435U (US20100268047A1-20101021-C00003.png)
JPS6274330U (US20100268047A1-20101021-C00003.png)
JPS6422026U (US20100268047A1-20101021-C00003.png)
JPS6351435U (US20100268047A1-20101021-C00003.png)
JPS62203272U (US20100268047A1-20101021-C00003.png)
JPS6336048U (US20100268047A1-20101021-C00003.png)
JPS62192635U (US20100268047A1-20101021-C00003.png)
JPS5996829U (ja) 半導体ウエ−ハの発熱担体
JPH02132942U (US20100268047A1-20101021-C00003.png)
JPS62120340U (US20100268047A1-20101021-C00003.png)
JPH0467344U (US20100268047A1-20101021-C00003.png)
JPH0272546U (US20100268047A1-20101021-C00003.png)
JPS62192636U (US20100268047A1-20101021-C00003.png)
JPS61153337U (US20100268047A1-20101021-C00003.png)
JPH0371623U (US20100268047A1-20101021-C00003.png)