JPS61173139U - - Google Patents

Info

Publication number
JPS61173139U
JPS61173139U JP5481185U JP5481185U JPS61173139U JP S61173139 U JPS61173139 U JP S61173139U JP 5481185 U JP5481185 U JP 5481185U JP 5481185 U JP5481185 U JP 5481185U JP S61173139 U JPS61173139 U JP S61173139U
Authority
JP
Japan
Prior art keywords
sample
holding
wafer
holder
rotatable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5481185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5481185U priority Critical patent/JPS61173139U/ja
Publication of JPS61173139U publication Critical patent/JPS61173139U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
JP5481185U 1985-04-15 1985-04-15 Pending JPS61173139U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5481185U JPS61173139U (enExample) 1985-04-15 1985-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5481185U JPS61173139U (enExample) 1985-04-15 1985-04-15

Publications (1)

Publication Number Publication Date
JPS61173139U true JPS61173139U (enExample) 1986-10-28

Family

ID=30576906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5481185U Pending JPS61173139U (enExample) 1985-04-15 1985-04-15

Country Status (1)

Country Link
JP (1) JPS61173139U (enExample)

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