JPS61173133U - - Google Patents
Info
- Publication number
- JPS61173133U JPS61173133U JP5722185U JP5722185U JPS61173133U JP S61173133 U JPS61173133 U JP S61173133U JP 5722185 U JP5722185 U JP 5722185U JP 5722185 U JP5722185 U JP 5722185U JP S61173133 U JPS61173133 U JP S61173133U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- insulating film
- semiconductor manufacturing
- etching
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985057221U JPH0322911Y2 (https=) | 1985-04-16 | 1985-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985057221U JPH0322911Y2 (https=) | 1985-04-16 | 1985-04-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61173133U true JPS61173133U (https=) | 1986-10-28 |
| JPH0322911Y2 JPH0322911Y2 (https=) | 1991-05-20 |
Family
ID=30581547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985057221U Expired JPH0322911Y2 (https=) | 1985-04-16 | 1985-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322911Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52115185A (en) * | 1976-03-24 | 1977-09-27 | Hitachi Ltd | Vapor phase growing apparatus |
| JPS5834913A (ja) * | 1981-08-27 | 1983-03-01 | Mitsubishi Electric Corp | ウエ−ハ支持具の清浄化方法 |
-
1985
- 1985-04-16 JP JP1985057221U patent/JPH0322911Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52115185A (en) * | 1976-03-24 | 1977-09-27 | Hitachi Ltd | Vapor phase growing apparatus |
| JPS5834913A (ja) * | 1981-08-27 | 1983-03-01 | Mitsubishi Electric Corp | ウエ−ハ支持具の清浄化方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322911Y2 (https=) | 1991-05-20 |