JPS61172164U - - Google Patents
Info
- Publication number
- JPS61172164U JPS61172164U JP5710185U JP5710185U JPS61172164U JP S61172164 U JPS61172164 U JP S61172164U JP 5710185 U JP5710185 U JP 5710185U JP 5710185 U JP5710185 U JP 5710185U JP S61172164 U JPS61172164 U JP S61172164U
- Authority
- JP
- Japan
- Prior art keywords
- cvd
- gas supply
- supply pipe
- core
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5710185U JPS61172164U (tr) | 1985-04-17 | 1985-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5710185U JPS61172164U (tr) | 1985-04-17 | 1985-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61172164U true JPS61172164U (tr) | 1986-10-25 |
Family
ID=30581314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5710185U Pending JPS61172164U (tr) | 1985-04-17 | 1985-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61172164U (tr) |
-
1985
- 1985-04-17 JP JP5710185U patent/JPS61172164U/ja active Pending