JPS61172163U - - Google Patents

Info

Publication number
JPS61172163U
JPS61172163U JP5596385U JP5596385U JPS61172163U JP S61172163 U JPS61172163 U JP S61172163U JP 5596385 U JP5596385 U JP 5596385U JP 5596385 U JP5596385 U JP 5596385U JP S61172163 U JPS61172163 U JP S61172163U
Authority
JP
Japan
Prior art keywords
hydrogen storage
cvd
storage means
main body
built
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5596385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5596385U priority Critical patent/JPS61172163U/ja
Publication of JPS61172163U publication Critical patent/JPS61172163U/ja
Pending legal-status Critical Current

Links

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  • Chemical Vapour Deposition (AREA)
JP5596385U 1985-04-15 1985-04-15 Pending JPS61172163U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5596385U JPS61172163U (enExample) 1985-04-15 1985-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5596385U JPS61172163U (enExample) 1985-04-15 1985-04-15

Publications (1)

Publication Number Publication Date
JPS61172163U true JPS61172163U (enExample) 1986-10-25

Family

ID=30579129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5596385U Pending JPS61172163U (enExample) 1985-04-15 1985-04-15

Country Status (1)

Country Link
JP (1) JPS61172163U (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118015A (en) * 1981-01-16 1982-07-22 Fuji Photo Film Co Ltd Manufacture of amorphous silicon
JPS58223612A (ja) * 1982-06-16 1983-12-26 Fuji Electric Corp Res & Dev Ltd アモルフアスシリコン膜生成装置
JPS6026663A (ja) * 1983-07-25 1985-02-09 Toshiba Ceramics Co Ltd Cvd炉用水素排ガス回収装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57118015A (en) * 1981-01-16 1982-07-22 Fuji Photo Film Co Ltd Manufacture of amorphous silicon
JPS58223612A (ja) * 1982-06-16 1983-12-26 Fuji Electric Corp Res & Dev Ltd アモルフアスシリコン膜生成装置
JPS6026663A (ja) * 1983-07-25 1985-02-09 Toshiba Ceramics Co Ltd Cvd炉用水素排ガス回収装置

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