JPS61172163U - - Google Patents
Info
- Publication number
- JPS61172163U JPS61172163U JP5596385U JP5596385U JPS61172163U JP S61172163 U JPS61172163 U JP S61172163U JP 5596385 U JP5596385 U JP 5596385U JP 5596385 U JP5596385 U JP 5596385U JP S61172163 U JPS61172163 U JP S61172163U
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen storage
- cvd
- storage means
- main body
- built
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5596385U JPS61172163U (enExample) | 1985-04-15 | 1985-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5596385U JPS61172163U (enExample) | 1985-04-15 | 1985-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61172163U true JPS61172163U (enExample) | 1986-10-25 |
Family
ID=30579129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5596385U Pending JPS61172163U (enExample) | 1985-04-15 | 1985-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61172163U (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57118015A (en) * | 1981-01-16 | 1982-07-22 | Fuji Photo Film Co Ltd | Manufacture of amorphous silicon |
| JPS58223612A (ja) * | 1982-06-16 | 1983-12-26 | Fuji Electric Corp Res & Dev Ltd | アモルフアスシリコン膜生成装置 |
| JPS6026663A (ja) * | 1983-07-25 | 1985-02-09 | Toshiba Ceramics Co Ltd | Cvd炉用水素排ガス回収装置 |
-
1985
- 1985-04-15 JP JP5596385U patent/JPS61172163U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57118015A (en) * | 1981-01-16 | 1982-07-22 | Fuji Photo Film Co Ltd | Manufacture of amorphous silicon |
| JPS58223612A (ja) * | 1982-06-16 | 1983-12-26 | Fuji Electric Corp Res & Dev Ltd | アモルフアスシリコン膜生成装置 |
| JPS6026663A (ja) * | 1983-07-25 | 1985-02-09 | Toshiba Ceramics Co Ltd | Cvd炉用水素排ガス回収装置 |
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