JPS61171730U - - Google Patents
Info
- Publication number
- JPS61171730U JPS61171730U JP5273785U JP5273785U JPS61171730U JP S61171730 U JPS61171730 U JP S61171730U JP 5273785 U JP5273785 U JP 5273785U JP 5273785 U JP5273785 U JP 5273785U JP S61171730 U JPS61171730 U JP S61171730U
- Authority
- JP
- Japan
- Prior art keywords
- drive mechanism
- support member
- chamber
- clean
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5273785U JPS61171730U (OSRAM) | 1985-04-11 | 1985-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5273785U JPS61171730U (OSRAM) | 1985-04-11 | 1985-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61171730U true JPS61171730U (OSRAM) | 1986-10-24 |
Family
ID=30572953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5273785U Pending JPS61171730U (OSRAM) | 1985-04-11 | 1985-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61171730U (OSRAM) |
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1985
- 1985-04-11 JP JP5273785U patent/JPS61171730U/ja active Pending