JPS61171506U - - Google Patents

Info

Publication number
JPS61171506U
JPS61171506U JP5642885U JP5642885U JPS61171506U JP S61171506 U JPS61171506 U JP S61171506U JP 5642885 U JP5642885 U JP 5642885U JP 5642885 U JP5642885 U JP 5642885U JP S61171506 U JPS61171506 U JP S61171506U
Authority
JP
Japan
Prior art keywords
chamber
supply means
feed type
filtration device
pulse feed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5642885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5642885U priority Critical patent/JPS61171506U/ja
Publication of JPS61171506U publication Critical patent/JPS61171506U/ja
Pending legal-status Critical Current

Links

JP5642885U 1985-04-15 1985-04-15 Pending JPS61171506U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5642885U JPS61171506U (fr) 1985-04-15 1985-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5642885U JPS61171506U (fr) 1985-04-15 1985-04-15

Publications (1)

Publication Number Publication Date
JPS61171506U true JPS61171506U (fr) 1986-10-24

Family

ID=30580011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5642885U Pending JPS61171506U (fr) 1985-04-15 1985-04-15

Country Status (1)

Country Link
JP (1) JPS61171506U (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5111479B1 (fr) * 1969-07-30 1976-04-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5111479B1 (fr) * 1969-07-30 1976-04-12

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