JPS61170061U - - Google Patents

Info

Publication number

JPS61170061U

JPS61170061U JP5211585U JP5211585U JPS61170061U JP S61170061 U JPS61170061 U JP S61170061U JP 5211585 U JP5211585 U JP 5211585U JP 5211585 U JP5211585 U JP 5211585U JP S61170061 U JPS61170061 U JP S61170061U

Authority

JP

Japan

Prior art keywords

recess

electrodes

oxygen sensor

alumina substrate

narrow opening

Prior art date

1985-04-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
• 229910052760 oxygen Inorganic materials 0.000 claims description 6
• 239000001301 oxygen Substances 0.000 claims description 6
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3