JPS61169323U - - Google Patents

Info

Publication number

JPS61169323U

JPS61169323U JP4993085U JP4993085U JPS61169323U JP S61169323 U JPS61169323 U JP S61169323U JP 4993085 U JP4993085 U JP 4993085U JP 4993085 U JP4993085 U JP 4993085U JP S61169323 U JPS61169323 U JP S61169323U

Authority

JP

Japan

Prior art keywords

clean chamber

air conditioning

utility

scope

registration request

Prior art date

1985-04-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004378 air conditioning Methods 0.000 claims description 2
• 238000009423 ventilation Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3

Cited By (2)