JPS61169323U - - Google Patents

Info

Publication number
JPS61169323U
JPS61169323U JP4993085U JP4993085U JPS61169323U JP S61169323 U JPS61169323 U JP S61169323U JP 4993085 U JP4993085 U JP 4993085U JP 4993085 U JP4993085 U JP 4993085U JP S61169323 U JPS61169323 U JP S61169323U
Authority
JP
Japan
Prior art keywords
clean chamber
air conditioning
utility
scope
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4993085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4993085U priority Critical patent/JPS61169323U/ja
Publication of JPS61169323U publication Critical patent/JPS61169323U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Temperature (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP4993085U 1985-04-05 1985-04-05 Pending JPS61169323U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4993085U JPS61169323U (US06623731-20030923-C00012.png) 1985-04-05 1985-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4993085U JPS61169323U (US06623731-20030923-C00012.png) 1985-04-05 1985-04-05

Publications (1)

Publication Number Publication Date
JPS61169323U true JPS61169323U (US06623731-20030923-C00012.png) 1986-10-21

Family

ID=30567575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4993085U Pending JPS61169323U (US06623731-20030923-C00012.png) 1985-04-05 1985-04-05

Country Status (1)

Country Link
JP (1) JPS61169323U (US06623731-20030923-C00012.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01238664A (ja) * 1988-03-18 1989-09-22 Toppan Printing Co Ltd 現像処理機構を有する処理装置
JP4718909B2 (ja) * 2005-06-15 2011-07-06 株式会社岡村製作所 換気機能を備えるブース

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01238664A (ja) * 1988-03-18 1989-09-22 Toppan Printing Co Ltd 現像処理機構を有する処理装置
JP4718909B2 (ja) * 2005-06-15 2011-07-06 株式会社岡村製作所 換気機能を備えるブース

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