JPS61169262U - - Google Patents

Info

Publication number
JPS61169262U
JPS61169262U JP5206885U JP5206885U JPS61169262U JP S61169262 U JPS61169262 U JP S61169262U JP 5206885 U JP5206885 U JP 5206885U JP 5206885 U JP5206885 U JP 5206885U JP S61169262 U JPS61169262 U JP S61169262U
Authority
JP
Japan
Prior art keywords
port
adsorbent
processing device
layer
suction port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5206885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5206885U priority Critical patent/JPS61169262U/ja
Publication of JPS61169262U publication Critical patent/JPS61169262U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP5206885U 1985-04-10 1985-04-10 Pending JPS61169262U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5206885U JPS61169262U (enrdf_load_stackoverflow) 1985-04-10 1985-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5206885U JPS61169262U (enrdf_load_stackoverflow) 1985-04-10 1985-04-10

Publications (1)

Publication Number Publication Date
JPS61169262U true JPS61169262U (enrdf_load_stackoverflow) 1986-10-20

Family

ID=30571682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5206885U Pending JPS61169262U (enrdf_load_stackoverflow) 1985-04-10 1985-04-10

Country Status (1)

Country Link
JP (1) JPS61169262U (enrdf_load_stackoverflow)

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