JPS6116864A - Manufacture of ink jet recording head - Google Patents

Abstract

PURPOSE:To inject ink without trouble from an ink jet recording head incorporating a filter by forming a sieve shaped at one end section of an ink supply path at the same time as a flow path through photoetching. CONSTITUTION:Grooves corresponding to a filter 6, ink supply paths 4, pressure generating chambers 3, pressure transmitting paths 2 and a nozzle group 1 are dug simultaneously in the direction vertical to a substrate 10 through a photoetching method. Consequently, since the filter is shaped at the same time as flow paths, the diameters of the filter also change similarly to errors on the manufacture of the diameters of nozzles. As a result, pressure generated in the pressure generating chambers is transmitted over the ink supply side, where the filter is arranged, and the nozzle side, but pressure is distributed at a proper value according to a design because the other parties similarly alter, and dispersion due to errors on manufacture has no effect on the characteristics of injection, thus resulting in the excellent injection of ink.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing an on-demand type inkjet recording head.

Conventionally, as disclosed in Japanese Unexamined Patent Application Publication No. 52-49055, a technique is known in which a filter is completely built in together with an ink supply path in an inkjet recording head. As disclosed in the above-mentioned publication, when the entire filter is built into the recording head, it is common to form the filter separately from the members constituting the recording head and integrate it later. This is a common method because filters are easily available. However, when an inkjet recording head is manufactured using this method, the inkjet recording head has a filter provided at the end of the ink supply path, a pressure generating chamber in the middle of the ink supply path, and a pressure generating chamber at the other end of the ink supply path. The injection nozzles are formed in the ink supply channel, each maintains a delicate correlation, and each is formed with minute dimensions. Therefore, when the diameter of the ink supply channel is small due to manufacturing variations, It becomes necessary to select a filter of a size corresponding to the size. If you don't do it like this,
The ink pressure in the ink supply path is unbalanced,
Ink will not be ejected normally from the ejection nozzle.

The present invention attempts to solve this problem, and aims to eject ink from an inkjet recording head with a built-in filter tray without any hindrance.

An uninvented method for manufacturing an on-demand type inkjet recording head includes an ink supply path between a pair of substrates, a filter for filtering the ink supplied to the ink supply path, and a pressure generation chamber. A filter provided at one end of the ink supply path on one substrate surface constituting the entire recording head, the ink supply path, the pressure generation chamber provided at the other end of the ink supply path, and After simultaneously forming a pressure transmission path connected to the pressure generation chamber, the pressure transmission path, and a groove corresponding to the ejection nozzle provided at the other end of the ink supply path in a direction intersecting the substrate surface by photoetching, The filter is characterized in that the filter is manufactured integrally with the ink supply path, the pressure generation chamber, the pressure transmission path, and the injection nozzle by bonding to the other substrate.

A method for manufacturing an inkjet recording head according to the present invention will be explained with reference to FIG. FIG. 1 shows one of a pair of substrates constituting a recording head for an on-demand type inkjet recording apparatus that generates full pressure using piezoelectric elements. As shown in FIG. 1, one substrate of the recording head is made of a material such as glass, and is etched by a photoetching method. Grooves corresponding to the generation chamber 5, the pressure transmission path 2 connected to the pressure generation chamber 5, and the nozzle group 1 connected to the pressure transmission path 2 are simultaneously dug in a direction perpendicular to the substrate 10. Note that an ink supply preparation chamber 5 may be provided between the filter 6 and the ink supply path 4. However, the lower ink inflow to the recording head, which is formed by drilling holes in the substrate 10, is formed in a process different from the photoetching described above.

In the figure, the black lines of the pressure transmission path 2, the ink supply path 4, and the filter 6 indicate that - is formed on the substrate 10 along the black lines. Further, the pressure generating chamber 3 has a groove formed in the area shape of a circle, and the □ ink supply preparation chamber 5 has a groove formed in the metal body within its area.

Similarly, grooves are formed over the entire plane of the portion from the ink inflow lower to the filter 6.

Therefore, if the etched groove in the filter 6 is deep, the grooves in the ink supply path 4, pressure generation chamber 3, pressure transmission path 2, and nozzle 1 will also be deep, and if they are shallow, they will become shallow at the same time. □The substrate 10, on which the grooves corresponding to the filter 6, the ink supply path 4, the pressure generation chamber 3, the pressure transmission path 2, etc. are formed simultaneously by photoetching, is attached to the other flat plate of glass or the like. By being joined to the substrate by adhesion, welding, etc., each becomes a filter, an ink supply path, a pressure generation chamber, a pressure transmission path, a nozzle, etc.

A pressure generating means such as a piezoelectric element is provided on the substrate corresponding to each pressure generating chamber.

In this way, according to the method for manufacturing an inkjet recording head of the present invention, the filter is formed simultaneously with the flow path, so
The filter diameter similarly changes due to manufacturing errors in the nozzle diameter. Therefore, the pressure generated in the pressure generation chamber is transmitted to the nozzle side and the ink supply side where the filter is arranged, but since the other side changes in the same way, the pressure distribution becomes an appropriate value throughout the design, and variations due to manufacturing errors are avoided. Good ink jetting can be performed without affecting the properties.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of a method of manufacturing an inkjet recording head of the present invention. 1... Nozzle group 4... Pink supply path 2...
・Pressure transmission path 5... Supply preparation chamber 3... Pressure generation chamber 6... Filter 7... Ink inlet Figure 1

Claims (1)

[Scope of Claims] A method for manufacturing an on-demand type inkjet recording head that includes an ink supply path between a pair of substrates, a filter for filtering ink supplied to the ink supply path, and a pressure generation chamber, comprising: a filter provided at one end of the ink supply path on one substrate surface constituting the ink supply path; the ink supply path; the pressure generation chamber provided at the other end of the ink supply path; and a filter connected to the pressure generation chamber. By simultaneously forming a pressure transmission path and a groove corresponding to an injection nozzle provided at the other end of the pressure transmission path in a direction crossing the surface of the substrate by photoetching, and then bonding it to the other substrate, A method of manufacturing an inkjet recording head, characterized in that a filter is manufactured integrally with the ink supply path, pressure generation chamber, pressure transmission path, and ejection nozzle.