JPS61168632U - - Google Patents
Info
- Publication number
- JPS61168632U JPS61168632U JP1985052494U JP5249485U JPS61168632U JP S61168632 U JPS61168632 U JP S61168632U JP 1985052494 U JP1985052494 U JP 1985052494U JP 5249485 U JP5249485 U JP 5249485U JP S61168632 U JPS61168632 U JP S61168632U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- mask stage
- exposure apparatus
- semiconductor exposure
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985052494U JPS61168632U (zh) | 1985-04-09 | 1985-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985052494U JPS61168632U (zh) | 1985-04-09 | 1985-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61168632U true JPS61168632U (zh) | 1986-10-20 |
Family
ID=30572495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985052494U Pending JPS61168632U (zh) | 1985-04-09 | 1985-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61168632U (zh) |
-
1985
- 1985-04-09 JP JP1985052494U patent/JPS61168632U/ja active Pending