JPS61167646U - - Google Patents

Info

Publication number
JPS61167646U
JPS61167646U JP5068985U JP5068985U JPS61167646U JP S61167646 U JPS61167646 U JP S61167646U JP 5068985 U JP5068985 U JP 5068985U JP 5068985 U JP5068985 U JP 5068985U JP S61167646 U JPS61167646 U JP S61167646U
Authority
JP
Japan
Prior art keywords
resist
nozzle
dropping
jetting
dropping device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5068985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5068985U priority Critical patent/JPS61167646U/ja
Publication of JPS61167646U publication Critical patent/JPS61167646U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP5068985U 1985-04-05 1985-04-05 Pending JPS61167646U (US06174465-20010116-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5068985U JPS61167646U (US06174465-20010116-C00003.png) 1985-04-05 1985-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5068985U JPS61167646U (US06174465-20010116-C00003.png) 1985-04-05 1985-04-05

Publications (1)

Publication Number Publication Date
JPS61167646U true JPS61167646U (US06174465-20010116-C00003.png) 1986-10-17

Family

ID=30569057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5068985U Pending JPS61167646U (US06174465-20010116-C00003.png) 1985-04-05 1985-04-05

Country Status (1)

Country Link
JP (1) JPS61167646U (US06174465-20010116-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989004727A1 (en) * 1987-11-16 1989-06-01 Nordson Corporation Method and apparatus for preventing coating of nozzle
JPH0246730A (ja) * 1988-08-08 1990-02-16 Nec Corp 塗布膜形成用ディスペンサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989004727A1 (en) * 1987-11-16 1989-06-01 Nordson Corporation Method and apparatus for preventing coating of nozzle
JPH0246730A (ja) * 1988-08-08 1990-02-16 Nec Corp 塗布膜形成用ディスペンサ

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