JPS61167620U - - Google Patents
Info
- Publication number
- JPS61167620U JPS61167620U JP5081885U JP5081885U JPS61167620U JP S61167620 U JPS61167620 U JP S61167620U JP 5081885 U JP5081885 U JP 5081885U JP 5081885 U JP5081885 U JP 5081885U JP S61167620 U JPS61167620 U JP S61167620U
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- illumination optical
- reflection illumination
- position facing
- emitted light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000005286 illumination Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
第１図は本考案の第１実施例の反射照明装置を
有する投影検査機の概略図、第２図は第１図のＡ
―Ａ′矢視に相当する断面図、第３図は第２図の
Ｂ―Ｂ′矢視断面図、第４図は本考案の第２実施
例の主要部を示す斜視図である。
（主要部分の符号の説明）、１……垂直反射照
明光学系、２……斜向反射照明光学系、Ｍ……標
本面、４……発光源（ハロゲンランプ）、６……
選択装置、６５……光路切換つまみ。
FIG. 1 is a schematic diagram of a projection inspection machine having a reflective illumination device according to the first embodiment of the present invention, and FIG.
3 is a sectional view taken along the line B-B' in FIG. 2, and FIG. 4 is a perspective view showing the main parts of the second embodiment of the present invention. (Explanation of symbols of main parts), 1... Vertical reflective illumination optical system, 2... Oblique reflective illumination optical system, M... Specimen surface, 4... Light source (halogen lamp), 6...
Selection device, 65... optical path switching knob.
Claims (1)
互いの光軸が標本面の反対側にてほぼ交差する如
く配設すると共に、前記光軸の交差位置に射出光
が指向性を有する発光源を配設し、前記射出光の
最強度方向が前記垂直反射照明光学系を向く位置
と、前記斜向反射照明光学系を向く位置とで選択
できるように前記発光源を回転する選択装置を設
けたことを特徴とする反射照明装置。 A vertical reflection illumination optical system and an oblique reflection illumination optical system are arranged so that their optical axes substantially intersect on opposite sides of the specimen surface, and the emitted light has directionality at the intersection of the optical axes. a selection device that rotates the light emitting source so that the direction of the highest intensity of the emitted light can be selected between a position facing the vertical reflection illumination optical system and a position facing the oblique reflection illumination optical system; A reflective lighting device characterized by providing:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5081885U JPS61167620U (en) | 1985-04-05 | 1985-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5081885U JPS61167620U (en) | 1985-04-05 | 1985-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61167620U true JPS61167620U (en) | 1986-10-17 |
Family
ID=30569307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5081885U Pending JPS61167620U (en) | 1985-04-05 | 1985-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61167620U (en) |
-
1985
- 1985-04-05 JP JP5081885U patent/JPS61167620U/ja active Pending
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