JPS61166787U - - Google Patents
Info
- Publication number
- JPS61166787U JPS61166787U JP4996885U JP4996885U JPS61166787U JP S61166787 U JPS61166787 U JP S61166787U JP 4996885 U JP4996885 U JP 4996885U JP 4996885 U JP4996885 U JP 4996885U JP S61166787 U JPS61166787 U JP S61166787U
- Authority
- JP
- Japan
- Prior art keywords
- vertical movement
- sensor
- manipulator
- movement device
- load sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 230000002265 prevention Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4996885U JPS61166787U (nl) | 1985-04-05 | 1985-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4996885U JPS61166787U (nl) | 1985-04-05 | 1985-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61166787U true JPS61166787U (nl) | 1986-10-16 |
Family
ID=30567651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4996885U Pending JPS61166787U (nl) | 1985-04-05 | 1985-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61166787U (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011152621A (ja) * | 2010-01-28 | 2011-08-11 | Yaskawa Electric Corp | 基板搬送用装置 |
| CN102896638A (zh) * | 2011-07-27 | 2013-01-30 | 发那科株式会社 | 带重量测量功能的吸附式机械手 |
-
1985
- 1985-04-05 JP JP4996885U patent/JPS61166787U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011152621A (ja) * | 2010-01-28 | 2011-08-11 | Yaskawa Electric Corp | 基板搬送用装置 |
| CN102896638A (zh) * | 2011-07-27 | 2013-01-30 | 发那科株式会社 | 带重量测量功能的吸附式机械手 |
| JP2013027940A (ja) * | 2011-07-27 | 2013-02-07 | Fanuc Ltd | 重量計測機能付き吸着式ロボットハンド |