JPS61166369U - - Google Patents

Info

Publication number
JPS61166369U
JPS61166369U JP4847785U JP4847785U JPS61166369U JP S61166369 U JPS61166369 U JP S61166369U JP 4847785 U JP4847785 U JP 4847785U JP 4847785 U JP4847785 U JP 4847785U JP S61166369 U JPS61166369 U JP S61166369U
Authority
JP
Japan
Prior art keywords
shaft
ultra
ring
high vacuum
bellows flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4847785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449813Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4847785U priority Critical patent/JPH0449813Y2/ja
Publication of JPS61166369U publication Critical patent/JPS61166369U/ja
Application granted granted Critical
Publication of JPH0449813Y2 publication Critical patent/JPH0449813Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sealing Devices (AREA)
JP4847785U 1985-04-01 1985-04-01 Expired JPH0449813Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4847785U JPH0449813Y2 (https=) 1985-04-01 1985-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4847785U JPH0449813Y2 (https=) 1985-04-01 1985-04-01

Publications (2)

Publication Number Publication Date
JPS61166369U true JPS61166369U (https=) 1986-10-15
JPH0449813Y2 JPH0449813Y2 (https=) 1992-11-24

Family

ID=30564771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4847785U Expired JPH0449813Y2 (https=) 1985-04-01 1985-04-01

Country Status (1)

Country Link
JP (1) JPH0449813Y2 (https=)

Also Published As

Publication number Publication date
JPH0449813Y2 (https=) 1992-11-24

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