JPS61164271U - - Google Patents

Info

Publication number
JPS61164271U
JPS61164271U JP4830285U JP4830285U JPS61164271U JP S61164271 U JPS61164271 U JP S61164271U JP 4830285 U JP4830285 U JP 4830285U JP 4830285 U JP4830285 U JP 4830285U JP S61164271 U JPS61164271 U JP S61164271U
Authority
JP
Japan
Prior art keywords
upper electrode
plasma etching
etching apparatus
electrode
stacking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4830285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4830285U priority Critical patent/JPS61164271U/ja
Publication of JPS61164271U publication Critical patent/JPS61164271U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP4830285U 1985-04-01 1985-04-01 Pending JPS61164271U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4830285U JPS61164271U (enrdf_load_stackoverflow) 1985-04-01 1985-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4830285U JPS61164271U (enrdf_load_stackoverflow) 1985-04-01 1985-04-01

Publications (1)

Publication Number Publication Date
JPS61164271U true JPS61164271U (enrdf_load_stackoverflow) 1986-10-11

Family

ID=30564431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4830285U Pending JPS61164271U (enrdf_load_stackoverflow) 1985-04-01 1985-04-01

Country Status (1)

Country Link
JP (1) JPS61164271U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008544500A (ja) * 2005-06-13 2008-12-04 ラム リサーチ コーポレーション 電極片を独立して移動させることによるエッチ速度の均一性の改善

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008544500A (ja) * 2005-06-13 2008-12-04 ラム リサーチ コーポレーション 電極片を独立して移動させることによるエッチ速度の均一性の改善

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