JPS61164029U - - Google Patents
Info
- Publication number
- JPS61164029U JPS61164029U JP4656085U JP4656085U JPS61164029U JP S61164029 U JPS61164029 U JP S61164029U JP 4656085 U JP4656085 U JP 4656085U JP 4656085 U JP4656085 U JP 4656085U JP S61164029 U JPS61164029 U JP S61164029U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor devices
- tray
- nozzle
- external terminals
- water toward
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000005507 spraying Methods 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図は本考案の試験後処理装置を示す平面図
、第２図は第１図のＡ―Ａ′線断面図である。
１……洗浄槽、２……乾燥槽、４……トレー、
８……半導体装置、９……外部端子、１０，１１
……ノズル。
FIG. 1 is a plan view showing the post-test processing apparatus of the present invention, and FIG. 2 is a sectional view taken along the line AA' in FIG. 1...Cleaning tank, 2...Drying tank, 4...Tray,
8...Semiconductor device, 9...External terminal, 10, 11
……nozzle.
Claims (1)
つ前記両槽に沿いトレーを移動可能に配設し、半
導体装置をトレーの移動方向に沿つて列状に配置
し該半導体装置をトレーにその外部端子が下方に
露出する姿勢に保持させ、洗浄槽内に、加圧純水
を半導体装置の外部端子に向けて噴射するノズル
を設置するとともに、乾燥槽内に、加圧乾燥空気
を半導体装置の外部端子に向けて噴射するノズル
を設置したことを特徴とする半導体装置の試験後
処理装置。 A cleaning tank and a drying tank are arranged in front and behind each other, a tray is movably arranged along both the tanks, and semiconductor devices are arranged in a row along the moving direction of the tray. A nozzle for spraying pressurized pure water toward the external terminals of the semiconductor device is installed in the cleaning tank, and pressurized dry air is supplied in the drying tank. 1. A post-test processing device for semiconductor devices, characterized in that a nozzle for ejecting water toward external terminals of semiconductor devices is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4656085U JPS61164029U (en) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4656085U JPS61164029U (en) | 1985-03-29 | 1985-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164029U true JPS61164029U (en) | 1986-10-11 |
Family
ID=30561071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4656085U Pending JPS61164029U (en) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164029U (en) |
-
1985
- 1985-03-29 JP JP4656085U patent/JPS61164029U/ja active Pending