JPS61164028U - - Google Patents

Info

Publication number
JPS61164028U
JPS61164028U JP3352085U JP3352085U JPS61164028U JP S61164028 U JPS61164028 U JP S61164028U JP 3352085 U JP3352085 U JP 3352085U JP 3352085 U JP3352085 U JP 3352085U JP S61164028 U JPS61164028 U JP S61164028U
Authority
JP
Japan
Prior art keywords
oven
compressed
photomask
door
opened
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3352085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3352085U priority Critical patent/JPS61164028U/ja
Publication of JPS61164028U publication Critical patent/JPS61164028U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP3352085U 1985-03-08 1985-03-08 Pending JPS61164028U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3352085U JPS61164028U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3352085U JPS61164028U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Publications (1)

Publication Number Publication Date
JPS61164028U true JPS61164028U (enrdf_load_stackoverflow) 1986-10-11

Family

ID=30536049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3352085U Pending JPS61164028U (enrdf_load_stackoverflow) 1985-03-08 1985-03-08

Country Status (1)

Country Link
JP (1) JPS61164028U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05208112A (ja) * 1992-01-30 1993-08-20 Tabai Espec Corp バックアップ温調部付クリーンオーブン

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05208112A (ja) * 1992-01-30 1993-08-20 Tabai Espec Corp バックアップ温調部付クリーンオーブン

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