JPS61164028U - - Google Patents
Info
- Publication number
- JPS61164028U JPS61164028U JP3352085U JP3352085U JPS61164028U JP S61164028 U JPS61164028 U JP S61164028U JP 3352085 U JP3352085 U JP 3352085U JP 3352085 U JP3352085 U JP 3352085U JP S61164028 U JPS61164028 U JP S61164028U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- compressed
- photomask
- door
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3352085U JPS61164028U (OSRAM) | 1985-03-08 | 1985-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3352085U JPS61164028U (OSRAM) | 1985-03-08 | 1985-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164028U true JPS61164028U (OSRAM) | 1986-10-11 |
Family
ID=30536049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3352085U Pending JPS61164028U (OSRAM) | 1985-03-08 | 1985-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164028U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05208112A (ja) * | 1992-01-30 | 1993-08-20 | Tabai Espec Corp | バックアップ温調部付クリーンオーブン |
-
1985
- 1985-03-08 JP JP3352085U patent/JPS61164028U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05208112A (ja) * | 1992-01-30 | 1993-08-20 | Tabai Espec Corp | バックアップ温調部付クリーンオーブン |
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