JPS61164025U - - Google Patents
Info
- Publication number
- JPS61164025U JPS61164025U JP4656685U JP4656685U JPS61164025U JP S61164025 U JPS61164025 U JP S61164025U JP 4656685 U JP4656685 U JP 4656685U JP 4656685 U JP4656685 U JP 4656685U JP S61164025 U JPS61164025 U JP S61164025U
- Authority
- JP
- Japan
- Prior art keywords
- counter electrode
- wafer
- etching chamber
- rotated
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4656685U JPS61164025U (sv) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4656685U JPS61164025U (sv) | 1985-03-29 | 1985-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164025U true JPS61164025U (sv) | 1986-10-11 |
Family
ID=30561083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4656685U Pending JPS61164025U (sv) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164025U (sv) |
-
1985
- 1985-03-29 JP JP4656685U patent/JPS61164025U/ja active Pending