JPS61162941U - - Google Patents
Info
- Publication number
- JPS61162941U JPS61162941U JP4622985U JP4622985U JPS61162941U JP S61162941 U JPS61162941 U JP S61162941U JP 4622985 U JP4622985 U JP 4622985U JP 4622985 U JP4622985 U JP 4622985U JP S61162941 U JPS61162941 U JP S61162941U
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- vacuum container
- exhaust
- inflow prevention
- matter inflow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4622985U JPS61162941U (enExample) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4622985U JPS61162941U (enExample) | 1985-03-29 | 1985-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61162941U true JPS61162941U (enExample) | 1986-10-08 |
Family
ID=30560433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4622985U Pending JPS61162941U (enExample) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61162941U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63299036A (ja) * | 1987-05-29 | 1988-12-06 | Tokyo Electron Ltd | 真空装置 |
-
1985
- 1985-03-29 JP JP4622985U patent/JPS61162941U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63299036A (ja) * | 1987-05-29 | 1988-12-06 | Tokyo Electron Ltd | 真空装置 |