JPS61162941U - - Google Patents

Info

Publication number
JPS61162941U
JPS61162941U JP4622985U JP4622985U JPS61162941U JP S61162941 U JPS61162941 U JP S61162941U JP 4622985 U JP4622985 U JP 4622985U JP 4622985 U JP4622985 U JP 4622985U JP S61162941 U JPS61162941 U JP S61162941U
Authority
JP
Japan
Prior art keywords
foreign matter
vacuum container
exhaust
inflow prevention
matter inflow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4622985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4622985U priority Critical patent/JPS61162941U/ja
Publication of JPS61162941U publication Critical patent/JPS61162941U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP4622985U 1985-03-29 1985-03-29 Pending JPS61162941U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4622985U JPS61162941U (cg-RX-API-DMAC7.html) 1985-03-29 1985-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4622985U JPS61162941U (cg-RX-API-DMAC7.html) 1985-03-29 1985-03-29

Publications (1)

Publication Number Publication Date
JPS61162941U true JPS61162941U (cg-RX-API-DMAC7.html) 1986-10-08

Family

ID=30560433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4622985U Pending JPS61162941U (cg-RX-API-DMAC7.html) 1985-03-29 1985-03-29

Country Status (1)

Country Link
JP (1) JPS61162941U (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299036A (ja) * 1987-05-29 1988-12-06 Tokyo Electron Ltd 真空装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299036A (ja) * 1987-05-29 1988-12-06 Tokyo Electron Ltd 真空装置

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