JPS61162051U - - Google Patents

Info

Publication number
JPS61162051U
JPS61162051U JP4321085U JP4321085U JPS61162051U JP S61162051 U JPS61162051 U JP S61162051U JP 4321085 U JP4321085 U JP 4321085U JP 4321085 U JP4321085 U JP 4321085U JP S61162051 U JPS61162051 U JP S61162051U
Authority
JP
Japan
Prior art keywords
cassette
arm
wafer
section
sample detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4321085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4321085U priority Critical patent/JPS61162051U/ja
Publication of JPS61162051U publication Critical patent/JPS61162051U/ja
Pending legal-status Critical Current

Links

JP4321085U 1985-03-27 1985-03-27 Pending JPS61162051U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4321085U JPS61162051U (US20080293856A1-20081127-C00150.png) 1985-03-27 1985-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4321085U JPS61162051U (US20080293856A1-20081127-C00150.png) 1985-03-27 1985-03-27

Publications (1)

Publication Number Publication Date
JPS61162051U true JPS61162051U (US20080293856A1-20081127-C00150.png) 1986-10-07

Family

ID=30554669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4321085U Pending JPS61162051U (US20080293856A1-20081127-C00150.png) 1985-03-27 1985-03-27

Country Status (1)

Country Link
JP (1) JPS61162051U (US20080293856A1-20081127-C00150.png)

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