JPS61161791A - Apparatus for positioning superfine pitch electrode - Google Patents
Apparatus for positioning superfine pitch electrodeInfo
- Publication number
- JPS61161791A JPS61161791A JP300885A JP300885A JPS61161791A JP S61161791 A JPS61161791 A JP S61161791A JP 300885 A JP300885 A JP 300885A JP 300885 A JP300885 A JP 300885A JP S61161791 A JPS61161791 A JP S61161791A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- positioning
- alignment
- pitch electrode
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、不透明回路基板と透明回路基板とこの基板を
コネクトする為の導電性コネクタにより構成される超細
密ピッチ電極の位置合わせ装置及び、２枚の透明回路基
板とこの基板をコネクトする為の導電性コネクタにより
構成される超細密ピッチ電極の位置合わせ装置の構造に
関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention provides an ultra-fine pitch electrode positioning device comprising an opaque circuit board, a transparent circuit board, and a conductive connector for connecting these boards; The present invention relates to the structure of an ultra-fine pitch electrode positioning device consisting of two transparent circuit boards and a conductive connector for connecting the boards.
従来の回路基板どうしのコネクト構造は、電極ピッチが
大きい為、基板の外形ガイドを利用した位置合わせて十
分に対応ができた。In the conventional connection structure between circuit boards, the electrode pitch is large, so positioning using the board's external guide was sufficient.
しかし、前述の従来技術では、基板の電極ピッチが細密
化されると、寸法公差の大きい基板外形ガイド方式によ
る位置合わせでは、細密化した電極を正確に合わせる事
ができないという問題を有する。However, the above-mentioned conventional technology has a problem in that when the electrode pitch of the substrate becomes finer, the finer electrodes cannot be accurately aligned using the substrate outer shape guide method, which has a large dimensional tolerance.
そこで本発明はこのような問題点を解決するもので、そ
の目的とするところは、超細密化された電極ピッチを有
する回路基板同志を正確にかつ容易に位置合わせする事
を提供するところにある。The present invention is intended to solve these problems, and its purpose is to provide accurate and easy alignment of circuit boards having ultra-fine electrode pitches. .
本発明の超細密ピッチ電極の位置合わせ装置は光検出装
置と、これに連動してＸ−Ｙ方向に動作するテーブルで
構成され自動的に基板同志の電極位置合わせを行う事を
特徴とする。The ultra-fine pitch electrode alignment apparatus of the present invention is comprised of a photodetector and a table that moves in the X-Y directions in conjunction with the photodetector, and is characterized by automatically aligning the electrodes between substrates.
本発明の上記構成によれば、電極の一部に合わせ用のマ
ークがパターン成形されている基板の一方を固定テーブ
ルに乗せ、同様にパターン成形されたもう一方の基板を
、Ｘ−Ｙ動作するテーブルに乗せ、この２枚の基板の合
せ用マークを検出する為の光検出装置により、２枚の基
板の合せ用マークをＸ−Ｙ動作テーブルにより一致させ
る事で２枚の超細密ピッチ電極を合わせるようにする。According to the above configuration of the present invention, one of the substrates on which the alignment mark is patterned on a part of the electrode is placed on a fixed table, and the other substrate on which the pattern is formed in the same way is moved in the X-Y direction. Place the two substrates on a table and use a photodetector to detect the alignment marks on the two substrates.By aligning the alignment marks on the two substrates with the X-Y movement table, the two ultra-fine pitch electrodes Try to match it.
第１図は、本発明の実施例の全体図、第２図はそのうち
の位置合わせマークと光検出の関係部分図である。FIG. 1 is an overall view of an embodiment of the present invention, and FIG. 2 is a partial view of the relationship between alignment marks and light detection.
第２図に示すごとく、ｘ−Ｙ動作テーブル（８）に固定
された透明基板（１）の電極（２）は、光検出装置（７
）によってもう一方の透明あるいは不透明な基板（４）
の電極（□５）に対して２枚の基板の合せマーク（３）
（６）を一致させるようシステム化された本発明装置に
より一致させる事が実現する。As shown in FIG. 2, the electrode (2) of the transparent substrate (1) fixed to the
) by the other transparent or opaque substrate (4)
Alignment mark (3) on the two boards for the electrode (□5)
(6) can be achieved by the apparatus of the present invention which is systemized to match.
なお位置合わせ精度を高める為に光検出部を２黒膜けで
ある。In order to improve alignment accuracy, the photodetector is covered with two black films.
〔発明の効果ゴ
以上述べたように本発明によれば、従来技術では不可能
である所の超細密化された電極ピッチに十分対応できる
導電性コネクタ使用のコネク！が実現可能となる効果を
有する。これにより、導電ゴムや、導電シートをコネク
タとして使用する構造を有した回路基板と液晶パネルと
のコネクト等には特に有益な効果を発揮する。[Effects of the Invention] As described above, according to the present invention, the connector uses a conductive connector that can sufficiently cope with ultra-fine electrode pitch, which is impossible with the conventional technology! This has the effect of making it possible to realize This has a particularly beneficial effect on connections between circuit boards and liquid crystal panels that have a structure in which conductive rubber or conductive sheets are used as connectors.
第１図は本発明の超細密ピッチ電極の位置合わせ装置の
一実施例を示す主要外観図。
第２図は、第１図のうちの位置合わせマークと光検出の
関係部分図である。
１・・・・・・透明基板
２・・・・・・１の電極
３・・・・・・１の合せマーク
４・・・・・・透明あるいは不透明な基板５・・・・・
・１の電極
６・・・・・・１の合せマーク
７・・・・・・光検出装置
８・・・・・・７−と連動するＸ−Ｙ動作テーブル９・
・・・・・４の固定テーブル
以 上FIG. 1 is a main external view showing one embodiment of the ultra-fine pitch electrode positioning device of the present invention. FIG. 2 is a diagram showing a portion of FIG. 1 related to the alignment mark and light detection. 1...Transparent substrate 2...1 electrode 3...1 alignment mark 4...Transparent or opaque substrate 5...
・X-Y operation table 9 that interlocks with the electrode 6 of 1...the alignment mark 7 of 1...the photodetector 8...7-
...4 fixed tables or more
Claims (1)
を固定テーブルに載せ、同様にマークが形成されたもう
一方の基板をＸ−Ｙ動作する移動テーブルに載せ、この
２枚の基板の合せ用マークを検出する光検出装置により
、２枚の基板の合わせ用マークをＸ−Ｙ動作する移動テ
ーブルにより一致させることを特徴とする超細密ピッチ
電極の位置合わせ装置。One of the substrates with alignment marks formed on part of the electrodes is placed on a fixed table, and the other substrate, on which marks are similarly formed, is placed on a moving table that moves in X-Y. An apparatus for aligning ultra-fine pitch electrodes, characterized in that alignment marks on two substrates are brought into alignment by a moving table that performs X-Y motion using a photodetector that detects the alignment marks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP300885A JPS61161791A (en) | 1985-01-11 | 1985-01-11 | Apparatus for positioning superfine pitch electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP300885A JPS61161791A (en) | 1985-01-11 | 1985-01-11 | Apparatus for positioning superfine pitch electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61161791A true JPS61161791A (en) | 1986-07-22 |
Family
ID=11545316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP300885A Pending JPS61161791A (en) | 1985-01-11 | 1985-01-11 | Apparatus for positioning superfine pitch electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61161791A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6791905B1 (en) | 1998-11-26 | 2004-09-14 | Citizen Watch Co., Ltd. | Timepiece |
-
1985
- 1985-01-11 JP JP300885A patent/JPS61161791A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6791905B1 (en) | 1998-11-26 | 2004-09-14 | Citizen Watch Co., Ltd. | Timepiece |
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