JPS61161287U - - Google Patents

Info

Publication number

JPS61161287U

JPS61161287U JP4651985U JP4651985U JPS61161287U JP S61161287 U JPS61161287 U JP S61161287U JP 4651985 U JP4651985 U JP 4651985U JP 4651985 U JP4651985 U JP 4651985U JP S61161287 U JPS61161287 U JP S61161287U

Authority

JP

Japan

Prior art keywords

substrate

holder

corner

fixing member

engaging

Prior art date

1985-03-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 12
• 230000037431 insertion Effects 0.000 claims description 5
• 238000003780 insertion Methods 0.000 claims description 5
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 239000007921 spray Substances 0.000 description 1
• 239000000126 substance Substances 0.000 description 1

Cited By (1)