JPS6116048B2 - - Google Patents
Info
- Publication number
- JPS6116048B2 JPS6116048B2 JP1693280A JP1693280A JPS6116048B2 JP S6116048 B2 JPS6116048 B2 JP S6116048B2 JP 1693280 A JP1693280 A JP 1693280A JP 1693280 A JP1693280 A JP 1693280A JP S6116048 B2 JPS6116048 B2 JP S6116048B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- liquid
- medium
- objective lens
- immersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 27
- 238000007654 immersion Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
Description
【発明の詳細な説明】
この発明は、液浸対物レンズを使用する光学顕
微鏡、すなわち液浸系顕微鏡の試料台に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample stage for an optical microscope using an immersion objective, that is, an immersion type microscope.
従来、この種の液浸系顕微鏡においては、試料
面にツエーデル油、カーギル油などの媒体液を滴
下させ、この媒体液に液浸対物レンズを浸漬させ
た状態とし、このように対物レンズと試料面との
間に媒体液を介在させて試料面の拡大観察をする
ようにしている。 Conventionally, in this type of immersion microscope, a medium solution such as tweedel oil or Cargill oil is dropped onto the sample surface, and the immersion objective lens is immersed in this medium solution. A liquid medium is interposed between the sample surface and the sample surface for magnified observation.
そして通常の試料では、試料面の観察領域が比
較的狭いために、試料を移動して観察視野を変更
した場合にも、媒体液の表面張力により介在液の
枯渇あるいは流出がないことから、通常の載物台
が試料台として使用可能であつた。しかし前記し
た観察領域が広い試料の場合、例えば直径が３〜
４インチのシリコンウエハのような試料の全面を
観察するようなとき、前記試料台では、まず試料
の移動量が大きいと媒体液の枯渇を生じて観察不
能となり、これを防止するために媒体液を補充し
ようとすると、対物レンズの試料面との間に気泡
などを混在してしまつて観察ができず、かつ液補
充作業が煩雑なばかりか、多量の媒体液を補充す
ると周囲に流出して汚染する不都合があり、また
媒体液による対物レンズへの試料の付着力が大き
いために、前記したシリコンウエハのような比較
的大きな試料であつても、対物レンズと試料面と
の焦点距離として必要な間隔を保持することがで
きないなどの欠点を有するものであつた。 In addition, since the observation area on the sample surface is relatively narrow in a normal sample, even if the observation field is changed by moving the sample, the intervening liquid will not be depleted or outflowed due to the surface tension of the medium liquid. The sample stage could be used as a sample stage. However, in the case of a sample with a wide observation area as described above, for example, the diameter is
When observing the entire surface of a sample such as a 4-inch silicon wafer, on the sample stage, if the amount of movement of the sample is large, the medium liquid will be depleted and observation will be impossible.To prevent this, the medium liquid is If you try to replenish the medium, air bubbles etc. will get mixed in between the objective lens and the sample surface, making observation impossible. Not only is the replenishment process complicated, but if you replenish a large amount of medium, it will spill out into the surroundings. Because of the inconvenience of contamination and the strong adhesion of the sample to the objective lens by the medium, even for relatively large samples such as the silicon wafer mentioned above, the required focal length between the objective lens and the sample surface is This method had disadvantages such as the inability to maintain proper spacing.
この発明は従来のこのような欠点を、試料台に
液浸のための凹部を形成させ、かつこの凹部内底
面に試料の吸着手段を配することで改善するよう
にしたものである。 The present invention improves these conventional drawbacks by forming a recess for liquid immersion in the sample stage and disposing sample adsorption means on the inner bottom surface of the recess.
以下、この発明に係わる試料台の一実施例につ
き、添付図面を参照して詳細に説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a sample stage according to the present invention will be described in detail below with reference to the accompanying drawings.
第１図および第２図はこの実施例による試料台
の平面および縦断面を示している。これらの各図
において、試料台の本体となる基台１は下面２が
平滑に加工されており、この基台１の上面部に
は、前記下面２と平行に内底面３ａ、側面３ｂか
らなる試料受け凹部３を形成してあり、かつ内部
に液室４を形成すると共に、前記内底面３ａと液
室４を複数の連通孔５で接続してある。また前記
液室４の一側にはシリンダ部６を取り出してあつ
て、このシリンダ部６内にプランジヤ７を挿入さ
せ、かつ前記試料受け凹部３および液室４を通し
て前記媒体液８を充填してあり、さらに液室４を
外部の図示省略した真空吸引装置９に連通させた
ものである。 1 and 2 show a plan view and a longitudinal section of a sample stage according to this embodiment. In each of these figures, a base 1 , which is the main body of the sample stage, has a smooth lower surface 2, and the upper surface of the base 1 has an inner bottom surface 3a and a side surface 3b parallel to the lower surface 2. A sample receiving recess 3 is formed, a liquid chamber 4 is formed inside, and the inner bottom surface 3a and the liquid chamber 4 are connected through a plurality of communication holes 5. Further, a cylinder portion 6 is taken out from one side of the liquid chamber 4, a plunger 7 is inserted into the cylinder portion 6, and the medium liquid 8 is filled through the sample receiving recess 3 and the liquid chamber 4. In addition, the liquid chamber 4 is connected to an external vacuum suction device 9 (not shown).
従つて前記実施例の構成では、第３図に示すよ
うに、試料１０は試料受け凹部３内に設置され
て、各連通孔５を閉塞した状態で媒体液８中に浸
漬される。ついでこの状態で真空吸引装置９を稼
動させると、その真空圧力がプランジヤ７を介し
て媒体液８に働き、前記試料１０を凹部内底面３
ａに密着して保持することになる。続いて液浸系
顕微鏡の対物レンズ１１を下降させて、媒体液８
中に浸漬すると共に、試料１０の観察面に対する
焦点距離を設定することで、その液浸系顕微鏡と
しての観察が可能になるのである。 Therefore, in the configuration of the above embodiment, as shown in FIG. 3, the sample 10 is placed in the sample receiving recess 3 and immersed in the medium liquid 8 with each communication hole 5 closed. Next, when the vacuum suction device 9 is operated in this state, the vacuum pressure acts on the medium liquid 8 via the plunger 7, and the sample 10 is drawn to the inner bottom surface 3 of the recess.
It will be held in close contact with a. Next, the objective lens 11 of the immersion microscope is lowered, and the medium liquid 8
By immersing the sample 10 in the liquid and setting the focal length to the observation surface of the sample 10, observation using an immersion microscope becomes possible.
このようにしてこの実施例によるときは、まず
試料１０および対物レンズ１１が常に媒体液８中
に浸漬されているために、たとえ試料１０が比較
的大きくても、この試料１０、対物レンズ１１を
相対的に平行移動した場合に、この両者間に媒体
液８の枯渇を生ずることがなく、従つて媒体液８
を補充しなくてすむために、気泡などの混在がな
くて正規の観察を継続でき、かつ媒体液８は凹部
３内に保持されていて外部への流出がなく、周囲
を汚染する惧れもなくなる。また試料１０は真空
圧力によつて、常に凹部内底面３ａに密着させて
いるために、媒体液８の表面張力で試料１０が対
物レンズ１１側に持ち上げられることがなく、こ
のことはまた基台１の下面２と凹部３の内底面３
ａとの平行性と相俟つて、例えば平行平面状に形
成されたシリコンウエハのような試料１０では、
対物レンズ１１との相対移動に際しても焦点距離
が変化せず、その再調整の必要がなくて比較的大
きい面積の全面を観察するのに有効であつて、Ｘ
−X′およびＹ−Y′方向への２次元的移動もしく
はＡ−A′法線軸を中心とする回転移動を可能に
し得るのである。 In this way, according to this embodiment, since the sample 10 and the objective lens 11 are always immersed in the medium liquid 8, even if the sample 10 is relatively large, the sample 10 and the objective lens 11 are In the case of relative translation, the medium liquid 8 does not become depleted between the two, and therefore the medium liquid 8
Because there is no need to replenish the liquid medium 8, normal observation can be continued without the presence of air bubbles, and the medium liquid 8 is
3 , so there is no leakage to the outside, and there is no risk of contaminating the surrounding area. In addition, since the sample 10 is always brought into close contact with the inner bottom surface 3a of the recess by vacuum pressure, the sample 10 is not lifted toward the objective lens 11 by the surface tension of the medium liquid 8. 1 lower surface 2 and inner bottom surface 3 of recess 3
In conjunction with the parallelism with a, for example, in the sample 10 such as a silicon wafer formed into a parallel plane,
The focal length does not change even when moving relative to the objective lens 11, and there is no need to readjust it, making it effective for observing the entire surface of a relatively large area.
Two-dimensional movement in the -X' and Y-Y' directions or rotational movement about the A-A' normal axis can be made possible.
以上詳述したようにこの発明によれば、液浸系
顕微鏡の試料台としての役割りを充分に果し得る
のであり、特に観察領域の広い試料に好適し、例
えば顕微鏡側にテレビカメラを接続し、得られる
電気映像信号によつて観察画像解析をなすように
するなどの自動化に役立つものである。 As described in detail above, the present invention can sufficiently serve as a sample stage for an immersion microscope, and is particularly suitable for specimens with a wide observation area.For example, a television camera can be connected to the microscope side. However, it is useful for automation, such as performing observation image analysis using the obtained electric video signal.
第１図はこの発明に係わる試料台の一実施例を
示す平面図、第２図は同上縦断面図、第３図は同
上使用状態の縦断面図である。
１……基台、２……下面、３……試料受け凹
部、３ａ……内底面、４……液室、５……連通
孔、６……シリンダ部、７……プランジヤ、８…
…媒体液、９……真空吸引装置、１０……試料、
１１……対物レンズ。
FIG. 1 is a plan view showing an embodiment of the sample stage according to the present invention, FIG. 2 is a longitudinal sectional view of the same, and FIG. 3 is a longitudinal sectional view of the same in use. 1 ...Base, 2...Bottom surface, 3 ...Sample receiving recess, 3a...Inner bottom surface, 4...Liquid chamber, 5...Communication hole, 6...Cylinder part, 7...Plunger, 8...
...Medium liquid, 9...Vacuum suction device, 10...Sample,
11...Objective lens.
Claims (1)
台であつて、上面部に下面と平行する試料受け凹
部を、内部にプランジヤを挿入したシリンダ部の
ある液室をそれぞれに形成した基台を設け、また
前記凹部内底面と液室とを複数の連通孔で接続さ
せて媒体液を充填すると共に、前記シリンダ部を
外部の真空吸引装置に連通させたことを特徴とす
る液浸系顕微鏡用試料台。1. A sample stage for an optical microscope using an immersion objective lens, which is equipped with a base having a sample receiving recess parallel to the bottom surface on the top surface and a liquid chamber each having a cylinder portion into which a plunger is inserted. Further, a sample for an immersion microscope, characterized in that the inner bottom surface of the recess and the liquid chamber are connected through a plurality of communication holes and filled with a medium liquid, and the cylinder part is communicated with an external vacuum suction device. The stand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1693280A JPS56113115A (en) | 1980-02-13 | 1980-02-13 | Sample table for immersion system microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1693280A JPS56113115A (en) | 1980-02-13 | 1980-02-13 | Sample table for immersion system microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56113115A JPS56113115A (en) | 1981-09-05 |
| JPS6116048B2 true JPS6116048B2 (en) | 1986-04-28 |
Family
ID=11929888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1693280A Granted JPS56113115A (en) | 1980-02-13 | 1980-02-13 | Sample table for immersion system microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56113115A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6330106B1 (en) * | 1999-02-17 | 2001-12-11 | Lucid, Inc. | Tissue specimen holder |
| DE10343876B4 (en) * | 2003-09-23 | 2011-01-13 | Vistec Semiconductor Systems Gmbh | Device for measuring feature widths on masks for the semiconductor industry |
| DE102004033195A1 (en) * | 2004-07-09 | 2006-02-23 | Leica Microsystems Semiconductor Gmbh | Device for inspecting a microscopic component |
| DE102004033208B4 (en) * | 2004-07-09 | 2010-04-01 | Vistec Semiconductor Systems Gmbh | Device for inspecting a microscopic component with an immersion objective |
| CN115704677A (en) * | 2021-08-13 | 2023-02-17 | 长鑫存储技术有限公司 | Metering standard device and preparation method thereof |
-
1980
- 1980-02-13 JP JP1693280A patent/JPS56113115A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56113115A (en) | 1981-09-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6542293B2 (en) | Apparatus and method for observing biochemical substance | |
| US5870223A (en) | Microscope system for liquid immersion observation | |
| EP0171319B1 (en) | Automatic device for analysing and cloning cell cultures and for performing bacteriological analysis | |
| JP2008506143A (en) | Equipment for inspection of microelements with immersion objective | |
| US7864437B2 (en) | Adaptor for microscope and microscope apparatus (microscope-use adaptor and microscope device) | |
| CN101283260B (en) | Cuvette for optical inspection of free floating ophthalmic lenses | |
| US20170329120A1 (en) | Testing equipment with magnifying function | |
| JPS6230966A (en) | Level controller | |
| WO1990004802A1 (en) | Stage for the rapid and indexed analysis with a microscope of filters and other supports carrying multiple samples, and method for analyzing such samples by using said stage | |
| FR2671631A1 (en) | Automatic electrophoresis apparatus | |
| EP3018467A1 (en) | Microscopic sample preparation | |
| JPS6116048B2 (en) | ||
| KR20160011296A (en) | Specimen-Reagent Response Examination Kit and Bio Scanner Including the Same | |
| US20190302439A1 (en) | Selective plane illumination microscopy with multiple illumination units scanning an object in sync with a digital camera rolling shutter | |
| JP6387427B2 (en) | Object moving device | |
| WO2014007624A1 (en) | Integrated light optical and charged particle beam inspection apparatus | |
| JP2000114124A (en) | Electrolyte vacuum impregnation method and equipment of electrolytic capacitor element | |
| KR102338887B1 (en) | Device for insertion into an imaging system | |
| US4202289A (en) | Specimen processing apparatus for microscopy | |
| JP2001061464A (en) | Biological sample culture vessel | |
| US10161852B2 (en) | Special purpose cuvette assembly and method for optical microscopy of nanoparticles in liquids | |
| JPH0614461B2 (en) | Gas atmosphere sample holder for electron microscope | |
| JPS6366467A (en) | Release vessel with isolated liquid layer holder | |
| JPS59194258U (en) | Scanning electron microscope with optical microscope | |
| JP6435201B2 (en) | Well plate and object observation apparatus using the same |