JPS61159025U - - Google Patents
Info
- Publication number
- JPS61159025U JPS61159025U JP4337685U JP4337685U JPS61159025U JP S61159025 U JPS61159025 U JP S61159025U JP 4337685 U JP4337685 U JP 4337685U JP 4337685 U JP4337685 U JP 4337685U JP S61159025 U JPS61159025 U JP S61159025U
- Authority
- JP
- Japan
- Prior art keywords
- supply path
- valve
- nitrogen gas
- hydrogen gas
- path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 238000010926 purge Methods 0.000 claims description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 238000000746 purification Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Hydrogen, Water And Hydrids (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4337685U JPS61159025U (un) | 1985-03-26 | 1985-03-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4337685U JPS61159025U (un) | 1985-03-26 | 1985-03-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61159025U true JPS61159025U (un) | 1986-10-02 |
Family
ID=30554988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4337685U Pending JPS61159025U (un) | 1985-03-26 | 1985-03-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61159025U (un) |
-
1985
- 1985-03-26 JP JP4337685U patent/JPS61159025U/ja active Pending