JPS61158944U - - Google Patents

Info

Publication number
JPS61158944U
JPS61158944U JP4341385U JP4341385U JPS61158944U JP S61158944 U JPS61158944 U JP S61158944U JP 4341385 U JP4341385 U JP 4341385U JP 4341385 U JP4341385 U JP 4341385U JP S61158944 U JPS61158944 U JP S61158944U
Authority
JP
Japan
Prior art keywords
wafer
holding
evaporation
identification symbol
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4341385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4341385U priority Critical patent/JPS61158944U/ja
Publication of JPS61158944U publication Critical patent/JPS61158944U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4341385U 1985-03-26 1985-03-26 Pending JPS61158944U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4341385U JPS61158944U (OSRAM) 1985-03-26 1985-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4341385U JPS61158944U (OSRAM) 1985-03-26 1985-03-26

Publications (1)

Publication Number Publication Date
JPS61158944U true JPS61158944U (OSRAM) 1986-10-02

Family

ID=30555059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4341385U Pending JPS61158944U (OSRAM) 1985-03-26 1985-03-26

Country Status (1)

Country Link
JP (1) JPS61158944U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993009565A1 (fr) * 1991-10-29 1993-05-13 Komatsu Electronic Metals Co., Ltd. Appareil et procede pour la fabrication de tranches de semi-conducteur

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5396015A (en) * 1977-02-02 1978-08-22 Shiseido Co Ltd Production of mirror with letter patterns* etc*
JPS5848414A (ja) * 1981-09-17 1983-03-22 Toshiba Corp 半導体基板の印字方法
JPS5825039B2 (ja) * 1975-02-28 1983-05-25 株式会社東芝 リニアモ−タノデンリヨクキヨウキユウソウチ
JPS58104178A (ja) * 1981-12-12 1983-06-21 Olympus Optical Co Ltd 電極蒸着方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825039B2 (ja) * 1975-02-28 1983-05-25 株式会社東芝 リニアモ−タノデンリヨクキヨウキユウソウチ
JPS5396015A (en) * 1977-02-02 1978-08-22 Shiseido Co Ltd Production of mirror with letter patterns* etc*
JPS5848414A (ja) * 1981-09-17 1983-03-22 Toshiba Corp 半導体基板の印字方法
JPS58104178A (ja) * 1981-12-12 1983-06-21 Olympus Optical Co Ltd 電極蒸着方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993009565A1 (fr) * 1991-10-29 1993-05-13 Komatsu Electronic Metals Co., Ltd. Appareil et procede pour la fabrication de tranches de semi-conducteur

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